| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1584c21cf27f9e557aec39240422a393
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2b31f8612f522a744762d83c23879ba |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3177
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2005-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d43ffa80a48145ee2bfe5a6e8fd817d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73a68f20d47f5506d4e2bf1b1c615821
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb565ae889cab991c1f024b54b142eaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62cf107cda510c17778552d12ab70aa8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5106a750e875a7488b120728c925eca0 |
| publicationDate |
2006-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20060070398-A |
| titleOfInvention |
Wafer-scale Microcolumn Arrays Using LTCC Substrates |
| abstract |
Disclosed is a wafer scale microcolumn array using an LTCC substrate. The microcolumn array includes a low temperature co-fired ceramic (LTCC) substrate having a wiring formed thereon, and a wafer-sized deflector array having a plurality of deflection elements arranged to be bonded to at least one side of the LTCC substrate and arranged to deflect an electron beam. . Wafer-scale microcolumn arrays using LTCC substrates can dramatically increase the throughput of semiconductor wafers per hour, simplifying the manufacturing process and significantly reducing costs.n n n n Wafer scale, LTCC substrate, deflector, same azimuth |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190105242-A |
| priorityDate |
2004-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |