http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060063688-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate | 2005-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97b44aa24523a804acae822986679a03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55178493c933ad4b56ac2ed8a215425d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1c0396631261eb7486fb01dfab92458 |
| publicationDate | 2006-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060063688-A |
| titleOfInvention | Metal etchant composition |
| abstract | The present invention relates to an etching liquid for forming a metal film used during the manufacturing process of a thin film transistor liquid crystal display device, specifically, a single film and / or a multilayer film made of aluminum (or aluminum alloy) or molybdenum (or molybdenum alloy), and The present invention relates to a new type of etching liquid composition which can be integrated and applied to indium oxide films such as ITO and IZO.n n n Etching solution of the present invention is 50 to 70% by weight of phosphoric acid, 2 to 8% by weight of nitric acid, 8 to 25% by weight of acetic acid, 0.1 to 5% by weight of Fe 3 + salt and 100% by weight of the total composition. An etchant composition containing water is provided to be%.n n n n Integrated etchant, molybdenum film, aluminum film, indium oxide film |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100045244-A |
| priorityDate | 2004-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.