| abstract |
The present invention relates to a layer of nitride, carbonitride or oxynitride of a) a carbon donor source for stabilized stoichiometry, and b) an element selected from the group of B, Al, Si, refractory metals, transition metals, rare earth metals. The above-described surface-modified refractory metal carbide coating, and with or without an electrically conductive pattern, the metal carbide is silicon carbide, tantalum carbide, titanium carbide, tungsten carbide, silicon oxycarbide, zirconium carbide, hafnium carbide, lanthanum A composite coating for use on a semiconductor processing element selected from the group consisting of carbide, vanadium carbide, niobium carbide, magnesium carbide, chromium carbide, molybdenum carbide, beryllium carbide and mixtures thereof. Composite coatings are characterized by improved corrosion resistance and less radiation sensitivity to wavelengths used in optical pyrometers under normal semiconductor processing environments. |