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publicationDate 2006-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20060055463-A
titleOfInvention Conductive Polishing Articles for Electrochemical Mechanical Polishing
abstract Embodiments of a polishing article for processing a substrate are provided. In one embodiment, the polishing article for treating the substrate comprises a fabric layer having a conductive layer disposed thereon. The conductive layer can be woven or nonwoven. In one embodiment, the conductive layer may be composed of a soft material and the exposed surface may be planar.
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