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filingDate 2005-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bbb706f49596278c890d0b08627b691
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publicationDate 2006-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20060049801-A
titleOfInvention Method of forming contact hole, method of manufacturing circuit board, and method of manufacturing electro-optical device
abstract In the present invention, when a contact hole is formed in an interlayer film by using a needle, and a conductive material is formed by embedding a conductive material, the conductive part has reliability of conduction and prevents disconnection of the wiring by the convex part. An object of the present invention is to provide a method for forming a contact hole, a method for manufacturing a circuit board, and a method for manufacturing an electro-optical device.n n n A substrate 20, a first electrode 34b provided on the substrate 20, an interlayer film 32 provided on the first electrode 34b, and a second electrode 34 provided on the interlayer film 32. In one circuit board 10, a conductive portion 300 made of a conductive material is formed in the contact hole H of the interlayer film 32 to conduct the first electrode 34b and the second electrode 34. . First, while mechanically punching the interlayer film 32 with the needle P, the first interlayer film 32 is chemically dissolved by the solvent contained in the needle P to reach the first electrode 34b. The contact hole H is formed, and the conductive portion 300 is formed by embedding a conductive material in the contact hole H.n n n n Needle, interlayer, chemical, dissolution, contact hole
priorityDate 2004-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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