http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060047347-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b434d7df701edeee249e68337cfe859e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T117-1004 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B13-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02P6-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02P6-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B1-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2005-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6548cf723a46ad38ac1d8f9fde582c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7b337629c594c0f91b765daea52d81f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09834271f8abce0622a5fafd81bf752b |
| publicationDate | 2006-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060047347-A |
| titleOfInvention | Crystallization device |
| abstract | The crystallization apparatus of the present invention irradiates the non-single crystal semiconductor film 5 with a light beam having a predetermined light intensity distribution to crystallize the semiconductor film, and phase modulates the plurality of unit regions arranged at predetermined intervals and have substantially the same pattern. An element 1 and an imaging optical system 4 disposed between the phase modulator and the non-single crystal semiconductor film are included. The unit region of the phase modulation element is a reference plane having a predetermined phase, a first region disposed near the center and having a first phase difference with respect to the reference plane, and disposed in the vicinity of the first region so as to be substantially different from the first phase difference with respect to the reference plane. It has a second area having the same phase difference. |
| priorityDate | 2004-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.