abstract |
(A) A photosensitive composition containing the sulfonium salt represented by general formula (I).n n n n n n n n Wherein Y 1 , Y 2 and Y 3 each independently represent a nitrogen-containing heteroaryl group, an alkyl group, a cycloalkyl group, an aryl group or an alkenyl group, and at least one of Y 1 , Y 2 and Y 3 represents a nitrogen-containing heteroaryl And two or more of Y 1 , Y 2 and Y 3 may combine with each other to form a ring; X n − represents an n-valent non-nucleophilic anion; n represents an integer of 1 to 3.) |