| titleOfInvention |
Precursor composition, production method of precursor composition, production method of ferroelectric film, piezoelectric element, semiconductor device, piezoelectric actuator, inkjet recording head, and inkjet printer |
| abstract |
It is an object of the present invention to provide a precursor composition for ferroelectric formation, a method for producing the precursor composition, and a method for producing a ferroelectric film using the precursor composition, in which the composition controllability is good and the metal components such as lead can be reused. . The precursor composition is a precursor composition comprising a precursor for forming a ferroelectric, wherein the ferroelectric is represented by the general formula AB 1-x C x O 3 , the A element consists of at least Pb, and the B element is Zr, Ti, V , W and Hf, at least one of Nb and Ta, and the precursor comprises at least the B and C elements, and also has an ester bond in a part.n n n n Liquid phase method, precursor composition, ferroelectric, ink jet recording head, piezoelectric element |