| abstract |
An object of the present invention is to provide a method of manufacturing an electro-optical device, an electro-optical device, and an electronic device that can prevent deterioration of a light emitting layer that occurs during a manufacturing process.n n n An electric having an electro-optical layer 110 sandwiched between the first electrode 23, the second electrode 50, and the first electrode 23 and the second electrode 50 on the base 200. In the manufacturing method of the optical apparatus 1, the process of forming the luminescent material protective layer 65 which covers the 2nd electrode 50 by the vacuum vapor deposition method, and the electrode protective layer 55 which covers the luminescent material protective layer 65 ) Is formed by a plasma film forming method.n n n n Electro-optical layer, light emitting material protective layer, electrode protective layer, gas barrier layer, EL display device, pixel electrode, organic light emitting layer, hole transport layer |