| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13439 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-133555
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-20 |
| filingDate |
2005-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4e9a152b5aac1551d8264940313acf8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_513d8700c558a4357a22ef61455180d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad1425bcced4d24593688207008302a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31f971642106a7d1d2cd6524ef93e544 |
| publicationDate |
2006-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20060042256-A |
| titleOfInvention |
Etching composition for laminate film containing reflective electrode and formation method of laminate wiring structure |
| abstract |
The etching composition of the present invention is amorphous on top of IZO or the like in one etching operation using only the composition to provide an etched laminate film having good normal taper or stepped edges. ) A three-layer laminate film including a transparent electrode film, a reflective electrode film made of Al, and a galvanic corrosion inhibiting film made of Mo, etc., or an amorphous transparent electrode film and an upper reflective electrode film. The films of the comprising two layer laminate film can be etched simultaneously. The etching composition comprises an aqueous solution comprising 30 to 40% by weight of phosphoric acid, 15 to 35% by weight of nitric acid, an organic acid and a cation generating component. |
| priorityDate |
2004-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |