| abstract |
Provided are a fluorine-containing polymer having a functional group and high transparency in a broad wavelength range, and a composition for resist comprising the fluorine-containing polymer.n n n Fluorine-containing fluorine-containing diene represented by following formula (1) which has a unit derived from the monomer unit to which the cyclic polymerization was carried out, the unit derived from the other cyclic polymerization-monomer unit, or the unit derived from the monomer unit to which the acryl-type monomer superposed | polymerized. A copolymer and a resist composition using this as a base polymer.n n n CF 2 = CFCH 2 CH (CH 2 C (CF 3 ) 2 (OR 1 )) CH 2 CH = CH 2 (1)n n n However, R 1 is a hydrogen atom, an alkyl group having 20 or less carbon atoms, an alkoxycarbonyl group having 6 or less carbon atoms, or CH 2 R 2 (R 2 is an alkoxycarbonyl group having 6 or less carbon atoms). |