http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060039263-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_495ffb72a5d95d10fc80a794a0f0329e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-547 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 |
| filingDate | 2004-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a37cb415d1bddf9161f482cde346e64d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a872a9e98e3486bbdc65590d13e22e16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd577ed7be0c9e37ac386b09064840c5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec450067e38f55471bd0868751d7acf7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_353de31b18baecde83c5416d9fb17188 |
| publicationDate | 2006-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060039263-A |
| titleOfInvention | Organic thin film deposition apparatus and organic thin film deposition method capable of measuring the thickness of the organic thin film deposited in real time |
| abstract | The present invention relates to an organic thin film deposition apparatus for manufacturing an organic light emitting device (OLED), and more particularly, to an organic thin film deposition apparatus capable of monitoring in real time the film thickness deposited on a substrate.n n n The present invention is disposed in the vacuum chamber in the same conditions as the substrate on which the organic thin film is inspected, the test substrate is arranged so that the thickness of the organic thin film deposited on the test substrate on which the organic thin film is deposited on its surface can be measured in real time. The information obtained by irradiating the laser onto the test substrate is Fourier transformed in real time so that the thickness of the organic thin film deposited on the substrate can be measured in real time.n n n n Organic light emitting diode, organic thin film, thickness measurement, laser, Fourier transform |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100832096-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100848336-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102217038-A |
| priorityDate | 2004-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.