abstract |
This invention relates to the board | substrate which consists of a sintered compact which has a ceramic material as a main component, and the thin film substrate in which the said single crystal thin film is formed in order to form the single crystal thin film which has as a main component gallium nitride, indium nitride, and aluminum nitride.n n n By using a sintered body mainly composed of a ceramic material as a substrate, in particular, a light-transmissive sintered body, a single crystal thin film having a high crystallinity mainly composed of at least one selected from gallium nitride, indium nitride, and aluminum nitride can be formed thereon. .n n n Moreover, the thin film substrate in which the single crystal thin film with high crystallinity was formed can be provided.n n n In addition, by using a sintered body containing such a ceramic material as a main component, it is possible to provide a light emitting device having excellent luminous efficiency. |