| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0735 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2004-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eda55fadd87e692b2caf6fb4f72eb627
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05f8f6645abaaa0bafde73e6467239b |
| publicationDate |
2006-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20060011864-A |
| titleOfInvention |
Sheet Probes, and Methods and Applications for Manufacturing the Same |
| abstract |
Even if the inspection object is a wafer having a large area of 8 inches or more in diameter or a circuit device with a very small pitch of the inspected electrode, in the burn-in test, the positional shift of the electrode structure and the inspected electrode due to the temperature change can be reliably prevented. Therefore, a sheet-like probe capable of stably maintaining a good electrical connection state, a manufacturing method thereof, and its application are disclosed.n n n In the sheet-like probe of the present invention, a plurality of electrode structures having a surface electrode portion exposed to the front surface and a back electrode portion exposed to the rear surface, which are arranged in accordance with a pattern corresponding to the electrodes to be connected to each other, are held in an insulating film made of a flexible resin. And a frame plate for supporting the contact film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8261164-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8250441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8848588-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8732542-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8195998-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8108748-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8671334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8547953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8510619-B2 |
| priorityDate |
2003-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |