http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060011592-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate | 2004-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7daac5ea37a9261532176d201ed0555c |
| publicationDate | 2006-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060011592-A |
| titleOfInvention | Deposition Method of High Density Plasma Oxide Film and Trench Gap Fill Method Using the Same |
| abstract | The present invention reduces the temperature difference between the preheating and the first deposition step of the HDP process to a minimum, and maximizes the temperature during the deposition process to reduce the liftability defects and maximize the gap fill characteristics and a method of depositing a high density plasma oxide film using the same In order to provide a gap fill method, the trench gap fill method of the present invention includes forming a trench by etching a semiconductor substrate to a predetermined depth, forming a sidewall oxide film on the bottom and sidewalls of the trench, and on the front surface including the sidewall oxide film. Laminating a liner nitride film and a liner oxide film, and depositing a high density plasma oxide film to gap fill the trench on the liner oxide film by performing a high density plasma process including a preheating step for performing parallel heating and plasma heating. do. n n n n STI, trench, HDP oxide, preheating, plasma heating, liner nitride |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100801739-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150012522-A |
| priorityDate | 2004-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977 |
Total number of triples: 17.