http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060008478-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-0335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 |
| filingDate | 2004-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6630d7b03eb08d79480451c0883d5a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fbe4d940187b4a5b398c30fa1a186ba |
| publicationDate | 2006-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060008478-A |
| titleOfInvention | Capacitor Formation Method of Semiconductor Device |
| abstract | Disclosed is a method of forming a capacitor of a semiconductor device of the present invention. Disclosed is a semiconductor device comprising: providing a semiconductor substrate on which a storage node contact plug is formed; Recessing the storage node contact plug such that a predetermined portion of the storage node contact plug is removed; Forming an interlayer dielectric layer on a substrate resultant comprising the recessed storage node contact plug; Etching back the interlayer insulating film; Sequentially forming an etch stop nitride film and an oxide film on the substrate product including the interlayer insulating film; Etching the oxide film and the etch stop nitride film so that a portion of the interlayer insulating film is exposed; Wet etching the interlayer dielectric layer to expose the storage node contact plugs; Forming a storage node by forming a conductive layer on the etched interlayer insulating layer and the oxide layer; And sequentially forming a dielectric layer and a plate node on the storage node. |
| priorityDate | 2004-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.