http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060004072-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bc8d5b80410c3a0594da023cfabcbe0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-102 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-02 |
| filingDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb94c04ba253eaa401ce7b7d9e9b7ef1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9609e66c21b67c2fe242ec3d6fea1571 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17214838c3269b3cb32e48c2709325a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03be0c8d5e63a71b86c1a81240a5e465 |
| publicationDate | 2006-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060004072-A |
| titleOfInvention | Method for Purifying Nitrogen Trifluoride Gas Using Zeolite 3A Ion-Exchanged and / or Impregnated with Alkaline Earth Metals |
| abstract | The present invention relates to a method for purifying nitrogen trifluoride gas, and more particularly, to a column packed with zeolite 3A which has been ion-exchanged and / or impregnated with alkaline earth metal and heated at 150 to 600 ° C. for 30 minutes to 100 hours. Through a nitrogen trifluoride (NF 3 ) gas containing carbon tetrafluoride (CF 4 ) through a selective adsorption of nitrogen trifluoride only relates to a method for purifying nitrogen trifluoride gas, according to the present invention It is possible to provide an effective method for removing carbon tetrafluoride from nitrogen fluoride gas.n n n Nitrogen trifluoride, NF3, carbon tetrafluoride, CF4, zeolite, zeolite 3A, ion exchange, impregnation |
| priorityDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 94.