http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060004068-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bc8d5b80410c3a0594da023cfabcbe0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-108 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-183 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0423 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-02 |
| filingDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccbd6ccfb2d39a20ed2908d1f22f16de http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9609e66c21b67c2fe242ec3d6fea1571 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03be0c8d5e63a71b86c1a81240a5e465 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17214838c3269b3cb32e48c2709325a7 |
| publicationDate | 2006-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060004068-A |
| titleOfInvention | Method for Purifying Nitrogen Trifluoride Gas Using Zeolite 4A Impregnated with Alkaline Earth Metal |
| abstract | The present invention relates to a method for purifying nitrogen trifluoride gas, and more particularly, carbon tetrafluoride (CF 4) through a column packed with zeolite 4A impregnated with alkaline earth metal and heated at 150 to 600 ° C. for 30 minutes to 100 hours. The present invention relates to a method for purifying nitrogen trifluoride gas, which comprises adsorbing nitrogen trifluoride (NF 3 ) gas, and selectively adsorbing only nitrogen trifluoride. The present invention relates to a carbon tetrafluoride gas from nitrogen trifluoride gas according to the present invention. It can provide an effective way to remove the.n n n Nitrogen trifluoride, NF3, carbon tetrafluoride, CF4, zeolite, zeolite 4A, impregnation |
| priorityDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 90.