http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050118531-A

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filingDate 2004-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2005-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20050118531-A
titleOfInvention Ultra-low dielectrics prepared by monosaccharide derivatives for cupper interconnect
abstract The present invention relates to an ultra low dielectric film for copper wiring using a monosaccharide derivative. More particularly, the ultra low dielectric composition containing a monosaccharide derivative having an alkoxysilane end group as a pore-forming template is prepared by curing and high temperature heat treatment. In one embodiment, the present invention relates to an ultra low dielectric film having a low dielectric constant, excellent mechanical strength, and containing very small nanopores of 2 nm or less.
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type http://data.epo.org/linked-data/def/patent/Publication

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