http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050116833-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cdd94f212dc7aef02fc1dcf28fa9b4fd |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3277 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2004-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6db4c2ff4865d6b542a9e68e98270c06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d1417d46e6f7febba3aa7e22133820f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e81c27e5ebc926dc51c3e0e79f258c66 |
| publicationDate | 2005-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050116833-A |
| titleOfInvention | Thin film forming apparatus and method for forming thin film |
| abstract | In the thin film forming apparatus, the discharge surfaces of the thin film forming apparatus face each other to form a discharge space to generate a high frequency electric field in the discharge space, and a gas containing the thin film forming gas is activated by the high frequency electric field. A gas supply is provided for supplying the gas and exposing the substrate with the activated gas to form a foil on the substrate. In addition, the thin film forming apparatus includes a cleaning film that prevents at least one of the first electrode and the second electrode from being exposed to the activated gas, wherein the cleaning film is continuous to the discharge surface and the discharge surface of at least one of the first electrode and the second electrode. The conveyance mechanism for films which adheres to at least one part of surfaces other than the front surface and conveys is provided. |
| priorityDate | 2003-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.