| abstract |
In this spectrometer, a plurality of interference filters 31, 32, ... having different transmission wavelength bands are sequentially arranged so that the light reflected from the specific interference filter 31 is incident on the next stage interference filter 32, and each interference In the spectroscopic apparatus formed by providing the photodetecting elements 41 and 42 in the position where the light which permeate | transmitted the filter has entered, the spectrometer is 20-200 nm thick in the light incident surface side of the interference filter 31 of the first stage. It is assumed that the silver thin film 31a is provided. |