| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24f54aefd7a75822ce9d6a7759e20068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01N3-2828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01N2240-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49345 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01N3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01N3-0892
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01N3-2825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01N3-01 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F01N3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F01N3-08 |
| filingDate |
2004-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0537ea18d36a86b1c9c6fba632eae97f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63d96e55fdab90455e1267df2844c31b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5665cfd3f28deceb6278df803bfa612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3cfed73134de9c26e7f0e7a9b6a1f07 |
| publicationDate |
2005-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20050110633-A |
| titleOfInvention |
Plasma reaction vessel, and method of producing the same |
| abstract |
In the plasma reactor 1 of the present invention, the plasma generating electrodes 2 capable of generating plasma are formed of two ceramic shaped bodies 3 and 4 in the form of two tapes, and two ceramic shaped bodies 3 and 4. By stacking two or more laminated structures 6 having electrically continuous film-like conductor electrodes 5 interposed therebetween in a state where plasma generating spaces 7 including laminated surfaces of each other are formed. It is possible to generate plasma in the plasma generating space 7 by mutual discharge of adjacent electrodes among the conductor electrodes 5, and can generate a uniform and stable plasma at low power, and The passage resistance of the gas which passes through the inside can be made small. |
| priorityDate |
2003-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |