| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d558a2cabc24ac97519d6f3dd09a1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f8dfd5447275bea4b74d914224d6f207 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K11-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0665 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 |
| filingDate |
2004-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d20746739faf787fc4511713271497da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec1a0e92cb31c6eaaff12d2b28afc857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c6b53dc28ede8549ca264d8060dc177 |
| publicationDate |
2005-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20050104770-A |
| titleOfInvention |
Semiconductor nano structure and method of forming the same |
| abstract |
Disclosed are a semiconductor nanostructure comprising a germanium nanostructure on a surface of a germanium structure and a method for forming a semiconductor nanostructure, the method comprising irradiating a pulsed laser to a semiconductor substrate.n n n In the method of the present invention, it is preferable to use a pulse laser of picoseconds or less femtoseconds, and the laser irradiation is preferably made of laser fluence of 14 (J / Cm 2 ) or more. In addition, in the structure of the present invention, the nanostructure has a radius of 1 to 100 nanometers in a spherical and hemispherical shape. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101363478-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100762291-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014007500-A1 |
| priorityDate |
2004-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |