http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050102989-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_717c792fca7cc9c290c9db33e8fe078b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate | 2004-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ccac4e73d77d7a69e0f8b218ac063c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4441fcd9e82de3d841fd37e3ab30580 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f84e94acb0a4092a5fdcb151e543a5c |
| publicationDate | 2005-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050102989-A |
| titleOfInvention | Planar structure probe using mems |
| abstract | The present invention relates to a planar probe using MEMS, wherein the probe of the present invention is formed on a substrate, a first conductive pattern formed on the substrate, a first conductive pattern and an insulating film formed on the substrate, and an insulating film. And a second conductive pattern connected to the first conductive pattern through a connection member formed inside the first conductive pattern, wherein the first conductive pattern includes a transmission line and a ground line formed on the left or right side of the transmission line, and the transmission line includes the connection member. It is preferable to be connected to the second conductive pattern through. Therefore, by using a MEMS and micromachining techniques, by manufacturing a probe having a diameter of 1 mm or less, which can be mass-produced at low cost, it is possible to solve the problem of price increase due to the miniaturization of the conventional open coaxial probe. |
| priorityDate | 2004-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.