http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050099246-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b991fd19844ea39214ff190e12860981 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-04 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-12 |
filingDate | 2004-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f06dc7c9de71083ff4fd8110eb67ff9e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e56c5828a09067ba4a1c4bc3a66637f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_915c23acd35321b463bd8e4cc5ead8dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7de396448c880ebe696a7611b4caef6 |
publicationDate | 2005-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20050099246-A |
titleOfInvention | Method of producing electronic grade tetraethoxysilane from tetrachlorosilane-trimethylchlorosilane azeotrope |
abstract | The present invention relates to a method for producing an electronic tetraethoxysilane from an azeotrope of silicon tetrachloride and trimethylchlorosilane, and more particularly, an azeotrope produced in the process of preparing a monosilane compound by the catalytic reaction of metal silicon and methane chloride. The process of converting silicon tetrachloride to ethoxychlorosilane by adding ethanol to an azeotrope of silicon tetrachloride and trimethylchlorosilane, which is difficult to separate by a general distillation method, and the boiling point difference in the process Is a simple step of distilling a mixture of trimethylchlorosilane and ethoxychlorosilanes, which are highly converted, to recover ethoxychlorosilanes by separating and removing the trimethylchlorosilane compound, and from the separated and recovered ethoxychlorosilanes. Related to the process for preparing the grade tetraethoxysilane It is.n n n According to the present invention, trimethylchlorosilane can be separated and reused by an azeotropic mixture of silicon tetrachloride and trimethylchlorosilane generated during the production of a monosilane compound in the catalytic reaction of metal silicon and methane chloride, and is prepared from silicon tetrachloride. Since chlorosilanes can be used to produce electronic grade tetraethoxysilanes in an excellent yield of more than 90%, there is an effect that can maximize the use efficiency of the monosilane compound obtained in the catalytic reaction of metal silicon and methane chloride. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109796484-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109021006-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109796484-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107903149-A |
priorityDate | 2004-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.