http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050094546-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09F7-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09F7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09F15-0006 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2004-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab59f89faa5564521ddb2694f5f665c9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e5de61a587e8727e1d48c75bc1170f3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81d3f86b980fc15d2d08c75666b92e4f |
| publicationDate | 2005-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050094546-A |
| titleOfInvention | Method of decreasing or remvoing by-product in a process of fabricating semiconductor devices and semiconductor fabrication equipment |
| abstract | Provided are methods for reducing or removing byproducts. According to this method, a reaction chamber; A reaction gas supply pipe for supplying a reaction gas to the reaction chamber; An exhaust pipe discharged from the reaction chamber and connected to the reaction chamber; A plasma trap connected to the exhaust pipe and configured to purify exhaust gas; A pump connected to the plasma trap to discharge exhaust gas; And a metal nitride film forming process using semiconductor manufacturing equipment having a hydrogen supply pipe connected to at least one of the reaction gas supply pipe and the exhaust pipe. Hydrogen is supplied to reduce or remove by-products. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020235873-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113423865-A |
| priorityDate | 2004-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.