| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F218-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
2005-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95cc335633b4ad537d7cd2b11940eb13 |
| publicationDate |
2005-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20050082425-A |
| titleOfInvention |
Silicon-containing polymer, negative type resist composition comprising the same, and patterning method for semiconductor device using the same |
| abstract |
A polymer comprising a first repeating unit composed of a monomer unit containing silicon and a monomer unit having an epoxy ring as a second repeating unit copolymerized with the first repeating unit is provided. The first repeating unit has the following structure.n n n n n n n n Wherein, R 1 is a hydrogen atom or a methyl group, X is an alkyl group or an alkoxy group of C 1 ~ C 4, n is an integer of 2 to 4. Moreover, the negative resist composition which consists of an alkali-soluble base polymer which consists of the polymer of this invention, PAG, and a crosslinking agent which can be bridge | crosslinked by the action of an acid is provided. |
| priorityDate |
2005-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |