http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050077471-A

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filingDate 2004-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1d35a7fffbdc72c0af5aaf4afec2de5
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publicationDate 2005-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20050077471-A
titleOfInvention Semiconductor device and method for manufacturing the same
abstract SUMMARY OF THE INVENTION The present invention provides a semiconductor device and a method of manufacturing the same, which can achieve high reliability by increasing the orientation of crystals constituting the lower electrode.n n n After the first interlayer insulating film 16 is formed, a SiO 2 cap film 17 is formed thereon, and degassing water in the first interlayer insulating film 16 and the SiO 2 cap film 17 is performed by heat treatment. Next, an Al 2 O 3 film 18 is formed on the SiO 2 cap film 17. Then, the Al 2 O 3 film 18 is heat-treated in an oxidizing atmosphere to promote oxidation of the surface thereof. Thereafter, a Pt film, a PLZT film, and an IrO 2 film are formed on the Al 2 O 3 film 18 and patterned to form the upper electrode 24, the capacitor insulating film 23, and the lower electrode 22. To form a ferroelectric capacitor having a.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100876838-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170024221-A
priorityDate 2004-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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