http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050069311-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_efd77c1983329ca444312479161a8c18 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76862 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32051 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2003-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00b275ce7c164d072fc6181e86fc53b4 |
| publicationDate | 2005-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050069311-A |
| titleOfInvention | Method for forming al interconnect |
| abstract | The present invention relates to a method of forming an aluminum metal wiring for improving the problem that occurs when forming an aluminum metal wiring on TiN.n n n An aluminum wiring forming method of the present invention comprises the steps of depositing Ti on a substrate on which a predetermined element is formed; Forming TiN on the Ti by CVD; Plasma treating the TiN; And a step of depositing aluminum on the TiN.n n n Therefore, the aluminum wiring forming method of the present invention can solve the problem of adhesion between TiN-Al formed by the prior art, (111) priority orientation, reduction of photoresist thickness margin due to TiN thickness during etching, galvanic corrosion problem, By effectively preventing the formation of TiAl 3 , there is an effect that can solve the problem of Al cross-sectional area reduction. |
| priorityDate | 2003-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.