| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2003-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2432b3e9d16f3a6f707f0c9ea44eb278
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8917872f727f2cef074445a45c7fc6b9 |
| publicationDate |
2005-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20050062919-A |
| titleOfInvention |
Method for forming capacitor of semiconductor device |
| abstract |
The present invention relates to a method of forming a capacitor of a semiconductor device, comprising: forming an etch stop nitride film on an entire surface of a semiconductor substrate having a bit line and a storage electrode contact plug, and forming an oxide film for a storage electrode on the etch stop nitride film And selectively etching the storage electrode oxide film and the etch stop nitride film to define a storage electrode region, forming a storage electrode over the entire surface of the structure, and filling the buried nitride film over the entire surface of the structure. And forming a storage electrode by performing a CMP process on the buried nitride film and the storage electrode using the storage oxide oxide as an etch stop layer, and removing the remaining buried nitride film from the resultant. A method of forming a capacitor of a semiconductor device is disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7807542-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115138230-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7727850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115138230-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100756788-B1 |
| priorityDate |
2003-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |