abstract |
Needless to say, what is harmful to health, trihalomethane (THM) is an impurity that must be removed from the electronics industry. The present invention provides a process for removing THM from high purity water used in the electronics industry. The process of the present invention consists in contacting high purity water with the membrane degassing apparatus 13, wherein the water is deionized prior to contacting the membrane (10, 11) and above room temperature, preferably 45 before contacting the membrane. It is characterized by being heated to below ℃. |