http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050050584-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
filingDate 2004-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1eff24f0effbb46f616df49f80a9987
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f978cad4641ba80ad0eab7abdeb94fbc
publicationDate 2005-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20050050584-A
titleOfInvention Compositions and methods for chemical mechanical polishing silica and silicon nitride
abstract The present invention relates to silica on a semiconductor wafer, comprising 0.001 to 1% by weight of phthalic acid and salts thereof, 0.001 to 1% by weight of quaternary ammonium compounds, 0.01 to 5% by weight of carboxylic acid polymers, 0.01 to 5% by weight of abrasive and residual amounts of water and Provided are aqueous compositions useful for polishing silicon nitride.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101252390-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101406763-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101345555-B1
priorityDate 2003-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517738
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86175481
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755888
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593286
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449277637
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421127682
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6339
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66077
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3833866
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450664886
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226398
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419584339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449892084
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453010884
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450114497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450106520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540308
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21917484
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525060
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5460630
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410916410
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID296854
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID961
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID32743
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474382
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559568
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17881685
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14325059
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19596813
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412527784
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75110
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1017
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453327643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID167232
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579073
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13998878
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414817459
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16134267
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451579679
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454515022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422032241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415928367
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549336
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733170
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449829751
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22409024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487220
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426285897
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450647129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2723671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24461
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8759
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451322489
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23676735
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099

Total number of triples: 100.