http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050044806-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6813f68bbadbcaae3828aa035190fede |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2003-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e94f76dec484b602cbc8b0a709a7e89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_308d3672815387d783761245b4d9df78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69f277ef11bd44cfaea90c7ee1250d08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e7d2fbdd880f1ba84e9c26eed53d9f7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fffdc8c84edf7f56136dacefb081b91 |
| publicationDate | 2005-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050044806-A |
| titleOfInvention | System and method for removing material |
| abstract | Embodiments of the present invention provide for the removal of process material crusts, such as ion-implanted photoresists, from a treatment object. Hydrocarbon gas in combination with oxygen gas is used to generate a halogen-free plasma, allowing the crust to be treated with plasma. Methane may be used as the hydrocarbon gas. The plasma can also be used to remove underlying unchanged photoresist and ion implant related residues. The plasma can be similarly generated using a hydrogen containing gas, which may be pure hydrogen gas, combined with oxygen gas. Several techniques are used that expose the treatment to a hydrogen / oxygen based plasma and then to a hydrocarbon / oxygen based plasma. |
| priorityDate | 2002-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.