http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050029226-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b6e46872fdbcf5b14a3e39c711e8f97 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28167 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2003-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af711d558b6edb01318f0b187aa6beab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15c1bf37e61e4832a9276bb873423a58 |
| publicationDate | 2005-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050029226-A |
| titleOfInvention | Hafnium silicide target and method for preparation thereof |
| abstract | A hafnium silicide target for forming a gate oxide film comprising HfSi 0.82-0.98 and having an oxygen content of 500 to 10,000 ppm.n n n For forming a gate oxide film by synthesizing a powder having a composition of HfSi 0.82-0.98 and pulverizing it to 100 mesh or less by hot pressing or hot hydrostatic pressing (HIP) at 1700 ° C to 2120 ° C and 150 to 2000 kgf / cm 2. Prepare a hafnium silicide target. It is most suitable for the formation of HfSiO film and HfSiON film which can be used as a high dielectric gate insulating film having the property of replacing the SiO 2 film and the SiON film, rich in embrittlement resistance, low particle generation and ignition in the target manufacturing process. It is to obtain a hafnium silicide target without the risk of explosion, and the like and a method for producing the same. |
| priorityDate | 2002-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.