| abstract |
The present invention is, for example, excellent in transparency to radiation having a wavelength of 200 nm or less, in particular of wavelength 160 nm or less, and excellent in etching resistance to dry etching, and in addition, hydrophobicity is suppressed, so that development characteristics are good, and therefore, A novel fluorine-containing polymerizable cyclic olefin compound useful as a base resin raw material is provided.n n n The present invention also provides a novel fluorine-containing polymerizable cyclic olefin compound having at least one partial structure represented by the following general formula (1) or (2).n n n <Formula 1>n n n n n n n n <Formula 2> |