http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050025091-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2004-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_601ba4a71019c4ad5d4dff3748ba6624 |
| publicationDate | 2005-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050025091-A |
| titleOfInvention | Stimulus-sensitive composition, compound and pattern formation method using the stimulus-sensitive composition |
| abstract | Potential polar composition with low PEB temperature dependence, improved contact hole resolution and profile, and pattern formation method using the same, and low PEB temperature dependence in the exposure wavelength of 200 nm or less, especially F 2 laser light (157 nm). In order to provide a resolving power, an improved potato polar composition having a profile and a pattern forming method using the same, and also a composition thereof, a new compound (A) which generates an acid or a radical by stimulation from the outside is provided.n n n Potato-polar composition containing the compound (A) of the specific structure which generate | occur | produces an acid or a radical by stimulation from the outside, the pattern formation method using the same, and the compound (A) of a specific structure. |
| priorityDate | 2003-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 229.