http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050025080-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2323-021
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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13378
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337
filingDate 2004-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65f475edba57c29d144d24aa4bece882
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_594840edf8e0117b2287f30afbd82e76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4544a78ec7291cec8b894632b76e8985
publicationDate 2005-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20050025080-A
titleOfInvention Inorganic alignment film and method for forming the same, substrate for electronic device, liquid crystal panel, and electronic equipment
abstract The present invention provides an inorganic alignment film excellent in light resistance and capable of generating a pretilt angle, providing a substrate for an electronic device, a liquid crystal panel, and an electronic device having such an inorganic alignment film. It aims at providing the formation method of such an inorganic alignment film, The formation method of the inorganic alignment film of this invention is a method of forming the inorganic alignment film mainly consisting of an inorganic material on a base material, The surface which forms the inorganic alignment film of a base material. And a milling step of irradiating the ion beam and a film forming step of forming an inorganic alignment film on the substrate on which the ion beam is irradiated, from a direction inclined by a predetermined angle θ b with respect to the vertical direction of the surface. The predetermined angle θ b in the milling process is 2 ° or more. The acceleration voltage of an ion beam at the time of irradiating an ion beam in a milling process is 400-1400V.
priorityDate 2003-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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