http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050018731-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate | 2003-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050018731-A |
| titleOfInvention | Etchant composition |
| abstract | The present invention relates to an etchant composition containing a perfluoroalkyl group-containing phosphoric acid compound, oxalic acid and water. |
| priorityDate | 2002-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.