| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76837
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2003-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7785db2231dc2cc5e2768c514d2ddea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cc87394902c86904ec9693bbf7df24a |
| publicationDate |
2005-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20050017585-A |
| titleOfInvention |
Method of gap-fill using a high density plasma deposision |
| abstract |
A gap fill method using a high density plasma deposition method is provided. According to this method, a first high density plasma oxide film is deposited using a reaction gas containing oxygen (O 2 ) and silane (SiH 4 ) on the substrate including the gap. The first high density plasma oxide film is etched by a predetermined thickness using an etching gas including NF 3 , and the first high density using oxygen (O 2 ), silane (SiH 4 ), and nitrogen fluoride (NF 3 ) as a reaction gas. A second high density plasma oxide film is deposited on the plasma oxide film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100713322-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100689826-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100771542-B1 |
| priorityDate |
2003-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |