| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b434d7df701edeee249e68337cfe859e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02675
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
2004-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09834271f8abce0622a5fafd81bf752b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6548cf723a46ad38ac1d8f9fde582c6 |
| publicationDate |
2005-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20050007141-A |
| titleOfInvention |
Crystallizing Apparatus and Method |
| abstract |
The crystallization apparatus includes an illumination optical system 2 and a phase shifter 1 for light modulating the light beams from the illumination optical system to a predetermined light intensity distribution, and the light-modulated light beams are subjected to a polycrystalline semiconductor film or an amorphous semiconductor film ( 4) to form a crystallized semiconductor film. The illumination optical system 2 emits a light beam having a non-circular cross section. A light beam from the illumination optical system and a rotating mechanism 3 for optically relative rotation of the phase shifter about the optical axis of the light beam are provided between the illumination optical system and the phase shifter. |
| priorityDate |
2003-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |