http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050006284-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2003-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050006284-A |
| titleOfInvention | Polishing fluid and method of polishing |
| abstract | The polishing liquid of the present invention comprises an acid containing a metal oxidant, a metal anticorrosive agent, a metal oxide solubilizer and water, wherein the metal oxide solubilizer has a dissociation constant (pKa) of 3.5 or more of the first dissociable acid group, an ammonium salt of the acid and It is 1 or more types chosen from the organic acid ester of the said acid, pH of a polishing liquid is 3-4, and the density | concentration of the metal oxidant is 0.01-3 weight%. By using the polishing liquid having a low abrasive concentration and a low metal anticorrosive concentration, the conductor used in the barrier layer can be polished at a high polishing rate in the wiring forming step of the semiconductor device. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100641348-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102209860-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200054007-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11279851-B2 |
| priorityDate | 2002-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 166.