| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_515c23e6c58230b33d8e0718e30e18ef |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65B37-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D83-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65B1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2004-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28eb2abe0c18e5931dae481ae5af09bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a72350ded397c66aef916ff0a4c7d66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81bb396d58242e309194437f4bf68204 |
| publicationDate |
2005-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20050006046-A |
| titleOfInvention |
Container and method for filling solid organometallic compound |
| abstract |
An object of the present invention is to provide a novel filling container capable of stably supplying a solid organometallic compound to a gaseous epitaxial growth apparatus such as a MOCVD apparatus at a constant concentration for a long time.n n n The filling container for a solid organometallic compound of the present invention is a filling container for a solid organometallic compound having a carrier gas inlet (2) and a carrier gas outlet (3), wherein the inside of the filling container has a plurality of vertical spaces. It is characterized by having a structure which is divided into and the carrier gas introduced from the carrier gas inlet 2 flows through each vertical space and is discharged from the carrier gas outlet 3. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102407768-B1 |
| priorityDate |
2003-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |