http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-200436092-Y1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0635 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0641 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2006-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-200436092-Y1 |
| titleOfInvention | Ion Nitriding Vacuum Deposition Coating Equipment |
| abstract | The present invention relates to a vacuum deposition coating apparatus capable of ionization, and more particularly, to a nitride layer on the surface of a metal material by ion nitriding in a coating furnace of a coating apparatus to increase wear resistance and durability of metal materials such as molds, punches, and tools. It relates to a coating apparatus capable of ion nitriding that can subsequently coat the metal ion thin film after forming.n n n The present invention is a vacuum deposition coating furnace 100 is one side is grounded so that the inside of the main body 110 and the voltage of the main body 110 is zero, and the metal material in the upper portion of the vacuum deposition coating furnace 100 at the upper end. The substrate 120, which can be fixedly installed and rotatable by a motor, enters and collides with ions on the surface of the metal material by a plasma outside the main body 110 of the coating furnace 100 to form a hard thin film. A plurality of targets 130, a nitrogen gas injection device 140 for injecting nitrogen gas into the main body 110 of the coating furnace 100 on one side of the main body 110 of the coating furnace 100, and the coating A heater 150 provided inside the main body 110 of the coating furnace 100 and the coating furnace 100, the inside of the main body 110 to adjust the temperature of the body 110 and the metal material of the furnace 100. In the coating device consisting of an exhaust device 160 for exhausting the air of the outside, when the ionization on the substrate 120 Type negative voltage is applied to, and hard thin film coating upon a direct current negative voltage is applied to the pulse-like and that the direct-current power supply to supply alternating pulses / DC combined power supply 200 and; The cylindrical body 310 is installed above the main body 110 of the coating furnace 100 to ionize the argon gas supplied into the body 310 during ionization to enter and collide with the surface of the metal material. An ion source device 300 for cleaning the surface; It consists of an ammonia gas injection device 400 for injecting ammonia gas into the main body 110 so that electrons are activated inside the main body 110 when ionized on the upper side of the main body 110 of the coating furnace 100.n n n n Ion nitriding, coating device, nitride layer, metal ion, ion source device, continuous coating |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013073864-A1 |
| priorityDate | 2006-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.