http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-200418119-Y1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2006-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-200418119-Y1 |
| titleOfInvention | Multilayer coated corrosion resistant aluminum parts |
| abstract | A method of applying a corrosion resistant coating to the surface of an aluminum component includes anodizing the surface of the aluminum component to form an anodized aluminum oxide layer and sputter coating a sputtering layer over the anodized aluminum oxide layer. The coated aluminum part can be used in a substrate processing chamber and includes a sputtering layer comprising an aluminum body, an anodized aluminum oxide layer formed over the aluminum body, and an aluminum oxide over the anodized aluminum oxide layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102434345-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150036607-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101992702-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230007157-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102101192-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200112949-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140009178-A |
| priorityDate | 2005-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.