http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040101399-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12 |
| filingDate | 2003-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040101399-A |
| titleOfInvention | Polymeric antireflective coatings deposited plasma enhanced chemical vapor deposition |
| abstract | The present invention provides an improved method of applying a polymer antireflective coating to a substrate surface and a precursor structure obtained therefrom. In general, the method includes plasma chemical vapor deposition (PECVD) of a polymer on a substrate surface. Most preferred starting monomers are 4-fluorostyrene, 2,3,4,5,6-pentafluorostyrene and allylpentafluorobenzene. The PECVD process includes applying a sufficient current and pressure to the monomer to sublimate the monomer into a gas and then converting the gas into a plasma state by application of a current. The vaporized monomer is then polymerized on the substrate surface in the deposition chamber. The method of the present invention is useful for providing a highly matched antireflective coating layer on a representative substrate having ultra-micron (0.25 μm or less) features. The process provides very fast deposition rates compared to conventional chemical vapor deposition (CVD) methods, and is environmentally friendly and economical. |
| priorityDate | 2002-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 279.