http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040101309-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate | 2003-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040101309-A |
| titleOfInvention | Vaporizer, various devices using the same, and vaporizing method |
| abstract | The present invention provides a method of depositing a CVD thin film which can be used for a long time without clogging of a filter and can stably supply raw materials to a reaction part.n n n The gas passage 2 formed inside the dispersion main body 1, the gas introduction port 4 for introducing the carrier gas 3 pressurized into the gas passage 2, and the gas passage 2 passing through the gas passage 2. A means 6 for supplying the raw material solution 5 to the carrier gas, a gas outlet 7 for sending the carrier gas containing the dispersed raw material solution 5 to the vaporization unit 22, and a gas passage 2 A dispersion (8) having means (18) for cooling); It has a vaporization pipe 20 connected to the gas outlet 7 of the reaction part and the dispersion part 8 of the apparatus, and the heater 21 which heats the vaporization pipe 20, and heats the carrier gas in which the raw material solution was disperse | distributed. It has a vaporization part 22 to vaporize, The pressure of the reaction part is set to be set lower than the pressure of a vaporization pipe. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160041828-A |
| priorityDate | 2002-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.