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filingDate 2003-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fb4a4b08544b586c93a96470f0d8ac5
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publicationDate 2004-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20040099802-A
titleOfInvention SONOS memory device having nanocrystal layer
abstract Disclosed is a Sonos memory device having a nano-sized crystal layer. The disclosed sonos memory device is a sonos memory device including a memory transistor having a gate having a sono gate structure on a semiconductor substrate, and the gate includes a tunneling oxide film and a trap site for trapping charge passing through the tunneling oxide film. The memory node layer and the gate electrode are sequentially stacked, and the memory node layer includes a crystal layer made of crystals having nano size and spaced apart from each other for trapping of the charge.
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