| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-151 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0381 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
2003-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2004-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20040099326-A |
| titleOfInvention |
ANTIREFLECTIVE SiO-CONTAINING COMPOSITIONS FOR HARDMASK LAYER |
| abstract |
Antireflective compositions of the invention characterized by the presence of SiO containing polymers having chromophore sites and transparent sites are useful antireflective hardmask compositions in lithographic processes. Such compositions provide very good optical, mechanical and etch selectivity properties while at the same time providing applicability using spin-on application techniques. Advantageously, the compositions of the present invention are useful for shorter wavelength lithographic processes and / or have minimal residual acid content. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100894931-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7923524-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100783064-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100783068-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100817914-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100783070-B1 |
| priorityDate |
2002-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |