http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040094200-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2b31f8612f522a744762d83c23879ba |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B11-1001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B11-1023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B11-1067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B11-0089 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B11-1073 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 |
filingDate | 2003-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bb01f7de4389718ef26e7181a382a35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c73d94d496d4ba8eda42c05a6e3ba930 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e02fed5fe1f62eb0bee41ee38b397928 |
publicationDate | 2004-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20040094200-A |
titleOfInvention | Method for forming barrier layer on anode in organic light emitting device and organic light emitting device comprising barrier layer on anode |
abstract | The present invention relates to a method of forming an anode barrier layer on an anode electrode surface of an organic light emitting device by an atomic layer deposition method and an organic light emitting device including an anode barrier layer formed by an atomic layer deposition method. A method of forming an anode barrier layer according to the present invention comprises the steps of: placing a substrate on which an anode layer is formed in a reaction chamber; Injecting a precursor comprising the elements constituting the anode barrier layer into the chamber; Maintaining the temperature in the chamber above room temperature and inducing a surface chemical reaction between the precursors to form an anode barrier layer with a thickness of 2 nm or less. According to the present invention, by using the surface chemical reaction of the precursors containing the thin film constituent elements, the insulating film having a large band gap is deposited on the anode while controlling to less than 1 angstrom thickness, and can be deposited precisely without pinholes. It is effective to increase efficiency. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106716663-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100721429-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016047936-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100829760-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101037794-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10256424-B2 |
priorityDate | 2003-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.