| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-12 |
| filingDate |
2003-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34647684cde78e12139491f75cf10783
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdd38d1d5c43042ef2a551436c4149c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91e97965b5cfb6d3b5c1bc5e526ac206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_089e61824556f8d8b44674e3d77e0a2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2edd6c157e40b9f0552914dfef43cb1e |
| publicationDate |
2004-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20040092545-A |
| titleOfInvention |
Method for manufacturing a metal layer and method for manufacturing semiconductor device using the same |
| abstract |
A method of manufacturing a metal film and a method of manufacturing a semiconductor device using the same are disclosed. A preliminary metal film is formed on the semiconductor substrate. Subsequently, a gas containing chlorine as a main component is introduced into the preliminary metal film to form a metal film by etching the surface of the preliminary metal film so that minute unevenness on the surface of the metal film is reduced. |
| priorityDate |
2003-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |